Electron-beam-induced deposition of three dimensional tungsten structure using high energy electrons | SAMURAI, NIMS Researchers Directory Service

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Electron-beam-induced deposition of three dimensional tungsten structure using high energy electrons

LIU, ZHIQUAN, MITSUISHI, Kazutaka, FURUYA, Kazuo.

Proceedings of 8th Asia-Pacific Conference on Electron Microscopy 76-77. 2004.

NIMS author(s)

MITSUISHI, Kazutaka

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-09-05 11:36:52 +0900 Updated at: 2022-09-05 11:36:52 +0900

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