準安定原子でイオン脱離-原子線ナノリソグラフィーに一歩
(ion desorption by metastable atoms; progress for atom beam nonolithography)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2022-09-05 11:19:26 +0900 Updated at: 2022-09-05 11:19:26 +0900