HOME > 論文 > 書誌詳細Silicon Micro/Nanofabrication Using Metastable Helium Atom Beam LithographyZ. P. Wang, M. Kurahashi, T. Suzuki, Z. J. Ding, Y. Yamauchi. Journal of Nanoscience and Nanotechnology 10 [11] 7443-7446. 2010.https://doi.org/10.1166/jnn.2010.2853 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻 :2016-05-24 16:02:44 +0900 更新時刻 :2022-09-05 12:23:30 +0900