Fabrication of <i>β</i> -Ga <sub>2</sub> O <sub>3</sub> /air-gap structures on (010) <i>β</i> -Ga <sub>2</sub> O <sub>3</sub> by wet etching in tetramethylammonium hydroxide (TMAH) | SAMURAI, NIMS Researchers Directory Service

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Fabrication of β -Ga ₂ O ₃ /air-gap structures on (010) β -Ga ₂ O ₃ by wet etching in tetramethylammonium hydroxide (TMAH)

Takayoshi Oshima.

Applied Physics Express 18 [11] 116501. 2025.

https://doi.org/10.35848/1882-0786/ae1e59

Open Access IOP Publishing (Publisher) Materials Data Repository (MDR)

NIMS author(s)

OSHIMA, Takayoshi

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Fabrication of <i>β</i> -Ga <sub>2</sub> O <sub>3</sub> /air-gap structures on (010) <i>β</i> -Ga <sub>2</sub> O <sub>3</sub> by wet etching in tetramethylammonium hydroxide (TMAH)

Created at: 2025-11-27 03:09:05 +0900 Updated at: 2026-10-08 09:14:28 +0900

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