電子線誘起蒸着によるナノ構造の直接描画
(Direct nano-writting using electron beam induced deposition)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 14:47:46 +0900 Updated at: 2018-12-14 23:05:29 +0900