Interaction of Boron and Phosphorus Impurities in Silicon Nanowires during Low-Temperature Ozone Oxidation | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Interaction of Boron and Phosphorus Impurities in Silicon Nanowires during Low-Temperature Ozone Oxidation
(低温酸化過程でのSiナノワイヤ中のボロンおよびリンの相互作用)

Naoki Fukata, Jun Kaminaga, Ryo Takiguchi, Riccardo Rurali, Mrinal Dutta, Kouichi Murakami.

The Journal of Physical Chemistry C 117 [39] 20300-20307. 2013.

https://doi.org/10.1021/jp406713p

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作成時刻: 2016-05-24 17:10:37 +0900更新時刻: 2024-04-02 03:40:08 +0900

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