Interaction of Boron and Phosphorus Impurities in Silicon Nanowires during Low-Temperature Ozone Oxidation
(低温酸化過程でのSiナノワイヤ中のボロンおよびリンの相互作用)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 17:10:37 +0900Updated at: 2024-04-02 03:40:08 +0900