HOME > 論文 > 書誌詳細Density of CH3 radicals and the ionic composition in a low pressure methane plasma beamOKADA, Katsuyuki, KOMATSU, Shojiro. Journal of Applied Physics 6923-6925. 1998.NIMS著者岡田 勝行Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-09-05 10:52:15 +0900更新時刻: 2022-09-05 10:52:15 +0900
