AESによるSiO2/Si試料表面の電子線照射損傷評価
(Quantitative Evaluaton of Electron Irradiation Damage on SiO2/Si with AES)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:47:21 +0900 Updated at: 2026-11-01 04:25:47 +0900