新しい機能性表面/界面創製のツールとしての低温大気圧ハイブリッド接合技術
(Hybrid Bonding Technology at Low Temperature and Atmospheric Pressure for Multi-Field Applications)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 18:07:02 +0900 Updated at: 2026-10-29 04:15:06 +0900