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Thermal recovery of damage in SiO2/Si structure implanted with copper negative-ions
(銅負イオン照射されたSiO2/Si構造のダメージの熱的回復過程)

AMEKURA, Hiroshi, 李致圭, KISHIMOTO, Naoki.

Transactions of Materials Research Society of Japan . .

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2022-11-15 00:40:22 +0900Updated at: 2022-11-15 00:40:22 +0900

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