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極高真空一貫プロセス対応型表面原子間評価装置の開発.
(The Development of Surface Atomic Force Microscope for XHV Continuous Process.)

原田雅章, 土佐正弘,吉原一紘, 土佐 正弘, 原田雅章, 土佐正弘,吉原一紘.
真空 37 [3] 136-139. 1996.

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