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(Reaction and Regrowth Control of CeO2 on Si(111) surface for the Silicon on Inslator structure)

知京 豊裕, S.M.Bedair, L.Tye, N.A.El-Masry, S. M. Bedair, L. Tye, N. A. El‐Masry.
Applied Physics Letters 65 [8] 1030-1032. 1994.
https://doi.org/10.1063/1.113011

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