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Reaction and regrowth control of CeO2on Si(111) surface for the silicon‐on‐insulator structure

Author(s)T. Chikyow, S. M. Bedair, L. Tye, N. A. El‐Masry.
Journal titleApplied Physics Letters 65 [8] 1030-1032
ISSN: 00036951, 10773118
ESI category: PHYSICS
PublisherAIP Publishing
Year of publication1994
Languageunknown
DOIhttps://doi.org/10.1063/1.113011
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