HOME > Article > DetailStructural evaluation of ions-implanted GaN films by photothermal deflection spectroscopy(N/A)Masatomo Sumiya, Kiyotaka Fukuda, Hideo Iwai, Tomohiro Yamaguchi, Takeyoshi Onuma, Tohru Honda. AIP Advances 8 [11] 115225. 2018.https://doi.org/10.1063/1.5052493 Open Access AIP Publishing (Publisher) NIMS author(s)SUMIYA, MasatomoIWAI, HideoFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2019-03-01 11:41:44 +0900Updated at: 2024-03-31 01:36:57 +0900