Plasma treatment of MoS<sub>2</sub> field-effect transistors using solid-state fluorine source | SAMURAI, NIMS Researchers Directory Service

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Plasma treatment of MoS₂ field-effect transistors using solid-state fluorine source

Hiroki Kii, Naoka Nagamura, Ryo Nouchi.

Nano Express 6 [2] 025008. 2025.

https://doi.org/10.1088/2632-959x/addadb

Open Access IOP Publishing (Publisher) Materials Data Repository (MDR)

NIMS author(s)

NAGAMURA, Naoka

Fulltext and dataset(s) on Materials Data Repository (MDR)

MDRavailable Plasma treatment of MoS<sub>2</sub> field-effect transistors using solid-state fluorine source

Created at: 2026-01-21 03:06:39 +0900 Updated at: 2026-09-30 06:07:23 +0900

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