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Effects of Aspect Ratio of Photoresist Patterns on Adhesive Strength between Microsized SU-8 Columns and Silicon Substrate under Bend Loading Condition

Chiemi Ishiyama, Akinobu Shibata, Masato Sone, Yakichi Higo.

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Fulltext and dataset(s) on Materials Data Repository (MDR)


    Created at: 2020-10-02 09:10:32 +0900Updated at: 2024-04-02 01:08:26 +0900

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