Sharing of secondary electrons by in-lens and out-lens detector in low voltage scanning electron microscope equipped with immersion lens | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Sharing of secondary electrons by in-lens and out-lens detector in low voltage scanning electron microscope equipped with immersion lens

Kazuhiro Kumagai, Takashi Sekiguchi.

Ultramicroscopy 109 [4] 368-372. 2009.

https://doi.org/10.1016/j.ultramic.2009.01.005

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作成時刻: 2016-05-24 15:44:43 +0900 更新時刻: 2026-11-02 04:39:50 +0900

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