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Correction of higher order geometrical aberration by triple 3-fold astigmatism field

H. Sawada, T. Sasaki, F. Hosokawa, S. Yuasa, M. Terao, M. Kawazoe, T. Nakamichi, T. Kaneyama, Y. Kondo, K. Kimoto, K. Suenaga.
Journal of Electron Microscopy 58 [6] 341-347. 2009.

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