Fabrication of Ordered Array of Tungsten Nanoparticles on Anodic Porous Alumina by Electron Beam Induced Selective Deposition | SAMURAI, NIMS Researchers Directory Service

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Fabrication of Ordered Array of Tungsten Nanoparticles on Anodic Porous Alumina by Electron Beam Induced Selective Deposition

Guoqiang Xie, Minghui Song, Kazutaka Mitsuishi, Kazuo Furuya.

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 22 [6] 2589. 2004.

https://doi.org/10.1116/1.1814108

NIMS author(s)

MITSUISHI, Kazutaka

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 12:00:11 +0900 Updated at: 2026-09-30 04:37:30 +0900

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