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Plasma etching phenomena in heavily boron-doped diamond growth

Alexandre Fiori, Tokuyuki Teraji.
Diamond and Related Materials 76 38-43. 2017.
https://doi.org/10.1016/j.diamond.2017.04.007

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    Created at: 2017-05-08 19:24:01 +0900Updated at: 2024-04-01 23:34:46 +0900

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