HOME > Article > DetailPlasma etching phenomena in heavily boron-doped diamond growthAlexandre Fiori, Tokuyuki Teraji. Diamond and Related Materials 76 38-43. 2017.https://doi.org/10.1016/j.diamond.2017.04.007 NIMS author(s)TERAJI, TokuyukiFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2017-05-08 19:24:01 +0900 Updated at: 2026-04-28 05:56:21 +0900
