Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O3Film by Metalorganic Chemical Vapor Deposition

Shintaro Yokoyama; Kenji Takahashi; Shoji Okamoto; Atsushi Nagai; Jun Minamidate; Keisuke Saito; Naoki Ohashi; Hajime Haneda; Osami Sakata; Shigeru Kimura; Ken Nishida; Takashi Katoda; Hiroshi Funakubo; Shintaro Yokoyama; Kenji Takahashi; Shoji Okamoto; Atsushi Nagai; Jun Minamidate; Keisuke Saito; Naoki Ohashi; Hajime Haneda; Osami Sakata; Shigeru Kimura; Ken Nishida; Takashi Katoda; Hiroshi Funakubo

doi:10.1143/jjap.45.5102

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Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O₃Film by Metalorganic Chemical Vapor Deposition
(Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O3Film by Metalorganic Chemical Vapor Deposition)

Shintaro Yokoyama, Kenji Takahashi, Shoji Okamoto, Atsushi Nagai, Jun Minamidate, Keisuke Saito, Naoki Ohashi, Hajime Haneda, Osami Sakata, Shigeru Kimura, Ken Nishida, Takashi Katoda, Hiroshi Funakubo.

Japanese Journal of Applied Physics 45 [6A] 5102-5106. 2006.

https://doi.org/10.1143/jjap.45.5102

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Materials Data Repository (MDR)上の本文・データセット

作成時刻: 2016-05-24 15:00:48 +0900更新時刻: 2025-02-10 09:10:19 +0900

Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O3Film by Metalorganic Chemical Vapor Deposition(Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O3Film by Metalorganic Chemical Vapor Deposition)

NIMS著者

Materials Data Repository (MDR)上の本文・データセット

Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O₃Film by Metalorganic Chemical Vapor Deposition
(Preparation and Structural Analysis of Micro-patterned Pb(Zr,Ti)O3Film by Metalorganic Chemical Vapor Deposition)