３元マグネトロンスパッタリングによるY-Ba-Cu-O膜の作製 | SAMURAI, NIMS Researchers Directory Service

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３元マグネトロンスパッタリングによるY-Ba-Cu-O膜の作製
(Preparation of High-Tc Y-Ba-Cu-O Films by Three-Target Magnestron Sputtering)

福富勝夫, 加藤和彦, 高原秀房, 田中吉秋, 浅野稔久, 前田弘, Nakao Akutsu, Masao Fukutomi, Kazuhiko Katoh, Hidefusa Takahara, Yoshiaki Tanaka, Hiroshi Maeda.

Japanese Journal of Applied Physics 29 [Part 2, No. 4] L604-L606. 1990.

https://doi.org/10.1143/jjap.29.l604

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Created at: 2016-05-24 11:31:39 +0900 Updated at: 2026-10-03 06:19:02 +0900

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