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Effects of Hydrogen in Working Gas on Valence States of Oxygen in Sputter-Deposited Indium Tin Oxide Thin Films
(スパッター蒸着したITO薄膜の酸素原子価に対する水素ガスの効果)

Suning Luo, Shigemi Kohiki, Koichi Okada, Atsushi Kohno, Takayuki Tajiri, Masao Arai, Satoshi Ishii, Daiichiro Sekiba, Masanori Mitome, Fumiya Shoji.
ACS Applied Materials & Interfaces 2 [3] 663-668. 2010.
https://doi.org/10.1021/am9006676

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