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著者名Suning Luo, Shigemi Kohiki, Koichi Okada, Atsushi Kohno, Takayuki Tajiri, Masao Arai, Satoshi Ishii, Daiichiro Sekiba, Masanori Mitome, Fumiya Shoji.
タイトルEffects of Hydrogen in Working Gas on Valence States of Oxygen in Sputter-Deposited Indium Tin Oxide Thin Films
掲載誌名ACS Applied Materials & Interfaces 2 3 663 668
ISSN: 19448244 19448252
発表年2010
言語English
DOI10.1021/am9006676
ESIでのカテゴリMATERIALS SCIENCE
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