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Impact of nitridation on open volumes in HfSiOx studied using monoenergetic positron beams

A. Uedono, K. Ikeuchi, T. Otsuka, K. Yamabe, K. Eguchi, M. Takayanagi, T. Ohdaira, M. Muramatsu, R. Suzuki, A. S. Hamid, T. Chikyow.
Applied Physics Letters 88 [17] 171912. 2006.

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