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Determination of Beam Affected area and Degradation of Cathodoluminescence in GaAs Induced by Focused Ion Beam Irradiation
(透過型電子顕微鏡中で集束イオンビームにより微細加工したGaAsのミクロ組織とカソードルミネッセンスの変化)

古屋一夫, 斎藤鉄哉, 斎藤鉄哉, 古屋一夫, 斎藤鉄哉, 斎藤鉄哉.
Journal of Applied Physics Letters 80 [3] 1922-1924. 1996.

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