Spatially-resolved EELS analysis of multilayer using EFTEM and STEM
(EFTEMおよびSTEMによる多層膜の位置分解EELS分析)
NIMS author(s)
Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 11:48:25 +0900 Updated at: 2026-09-30 04:22:38 +0900