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Ultra-thin SiO2 on Si, part V: Results of a CCQM Pilot Study of Thickness Measurements

M. P. Seah, S.J. Spencer, F. Bensebaa, I Vickridge, H Danzebrink, M Krumrey, T Gross, W Oesterle, W Wendler, B Rheinlaeder, Y Azuma, I Kojima, N Suzuki, M suzuki, TANUMA, Shigeo, D W Moon, H J Lee, Hyun Mo Cho, H Y Chen, A T S Wee, T Osipowicz, J S Pan, W A Jordaan, R Hauert, U Klots, C van der Marel, M Verheijen, Y Tamminga, C Jeynes, P Bailey, S. Biswas, U Falke, N V Nguyen, D Chandler, J R Ehrstein, D Muller, J A Dura.

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    Fulltext and dataset(s) on Materials Data Repository (MDR)


      Created at: 2016-05-24 12:01:11 +0900 Updated at: 2018-12-15 01:45:34 +0900

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