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Epitaxial lateral overgrowth of r-plane α-Ga2O3 with stripe masks along ⟨1¯21¯0⟩
(<-12-10>ストライプマスクを用いたr面α-Ga2O3の選択横方向成長)

Yuichi Oshima, Shingo Yagyu, Takashi Shinohe.
Journal of Applied Physics 130 [17] 175304. 2021.

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Created at: 2021-11-10 03:36:35 +0900 Updated at: 2026-10-30 07:01:52 +0900

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