HOME > 論文 > 書誌詳細Probing Ar ion induced nanocavities/bubbles in silicon by small-angle x-ray scatteringKoppoju Suresh, M. Ohnuma, Y. Oba, N. Kishimoto, P. Das, T. K. Chini. Journal of Applied Physics 107 [7] 073504. 2010.https://doi.org/10.1063/1.3327438 NIMS著者Materials Data Repository (MDR)上の本文・データセット作成時刻: 2016-05-24 16:02:21 +0900 更新時刻: 2026-10-30 08:55:28 +0900