HOME > Article > DetailProbing Ar ion induced nanocavities/bubbles in silicon by small-angle x-ray scatteringKoppoju Suresh, M. Ohnuma, Y. Oba, N. Kishimoto, P. Das, T. K. Chini. Journal of Applied Physics 107 [7] 073504. 2010.https://doi.org/10.1063/1.3327438 NIMS author(s)Fulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 16:02:21 +0900Updated at: 2024-03-31 18:02:33 +0900
