Analytical procedure for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopy | 研究者総覧SAMURAI - 物質・材料研究機構 (NIMS)

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Analytical procedure for experimental quantification of carrier concentration in semiconductor devices by using electric scanning probe microscopy

Takaya Fujita, Koji Matsumura, Hiroshi Itoh, Daisuke Fujita.

Measurement Science and Technology 25 [4] 044021. 2014.

https://doi.org/10.1088/0957-0233/25/4/044021

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作成時刻: 2016-05-24 17:34:58 +0900更新時刻: 2024-04-02 03:59:09 +0900

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