HOME > Article > DetailGraphical design for thin-film SMA microactuators(形状記憶合金薄膜アクチュエータの図式的設計)A Ishida, M Sato, W Yoshikawa, O Tabata. Smart Materials and Structures 16 [5] 1672-1677. 2007.https://doi.org/10.1088/0964-1726/16/5/020 NIMS author(s)ISHIDA, AkiraFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 15:01:25 +0900Updated at: 2024-05-02 06:25:09 +0900