Fabrication of a porous alumina mask on the large surface area of a semi-insulating semiconductor substrate
著者 | Chieko TAKIZAWA, Seiichi KATO, Atsushi GOTO, Hideaki KITAZAWA, Naoki IKEDA, Yoshimasa SUGIMOTO. |
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掲載誌名 | Journal of the Ceramic Society of Japan 121 [1414] 516-519 ISSN: 18820743, 13486535 ESIでのカテゴリ: MATERIALS SCIENCE |
出版社 | Ceramic Society of Japan |
発表年 | 2013 |
言語 | English |
DOI | https://doi.org/10.2109/jcersj2.121.516 |
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