Chieko TAKIZAWA; Seiichi KATO; Atsushi GOTO; Hideaki KITAZAWA; Naoki IKEDA; Yoshimasa SUGIMOTO

doi:10.2109/jcersj2.121.516

Fabrication of a porous alumina mask on the large surface area of a semi-insulating semiconductor substrate

著者	Chieko TAKIZAWA, Seiichi KATO, Atsushi GOTO, Hideaki KITAZAWA, Naoki IKEDA, Yoshimasa SUGIMOTO.
掲載誌名	Journal of the Ceramic Society of Japan 121 [1414] 516-519 ISSN: 18820743, 13486535 ESIでのカテゴリ: MATERIALS SCIENCE
出版社	Ceramic Society of Japan
発表年	2013
言語	English
DOI	https://doi.org/10.2109/jcersj2.121.516
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