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AuthorChieko TAKIZAWA, Seiichi KATO, Atsushi GOTO, Hideaki KITAZAWA, Naoki IKEDA, Yoshimasa SUGIMOTO.
TitleFabrication of a porous alumina mask on the large surface area of a semi-insulating semiconductor substrate
Journal titleJournal of the Ceramic Society of Japan 121 [1414] 516-519
ISSN: 13486535 18820743
Year of publication2013
LanguageEnglish
ESI category
DOIhttps://doi.org/10.2109/jcersj2.121.516
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