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Fabrication of a porous alumina mask on the large surface area of a semi-insulating semiconductor substrate

Chieko TAKIZAWA, Seiichi KATO, Atsushi GOTO, Hideaki KITAZAWA, Naoki IKEDA, Yoshimasa SUGIMOTO.
Journal of the Ceramic Society of Japan 121 [1414] 516-519. 2013.
https://doi.org/10.2109/jcersj2.121.516
Open Access Ceramic Society of Japan (Publisher)

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