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Improved depth resolution of secondary ion mass spectrometry profiles in diamond: A quantitative analysis of the delta-doping

Alexandre Fiori, François Jomard, Tokuyuki Teraji, Gauthier Chicot, Etienne Bustarret.
Thin Solid Films 557 222-226. 2014.
https://doi.org/10.1016/j.tsf.2013.10.076
Open Access Elsevier BV (Publisher)

NIMS author(s)

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