HOME > Article > DetailElectron induced nano-deposition of tungsten using field emission scanning and transmission electron microscopes(電界放射型の走査および透過電子顕微鏡を用いたタングステンの電子線誘起ナノデポジション)M. Shimojo, K. Mitsuishi, A. Tameike, K. Furuya. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 22 [2] 742. 2004.https://doi.org/10.1116/1.1688349 NIMS author(s)MITSUISHI, KazutakaFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2016-05-24 12:02:40 +0900 Updated at: 2026-09-30 04:15:49 +0900