Multiple Roles of Hydrogen Treatments in Amorphous In–Ga–Zn–O Films

著者	Haochun Tang, Yosuke Kishida, Keisuke Ide, Yoshitake Toda, Hidenori Hiramatsu, Satoru Matsuishi, Shigenori Ueda, Naoki Ohashi, Hideya Kumomi, Hideo Hosono, Toshio Kamiya.
掲載誌名	ECS Journal of Solid State Science and Technology 6 [7] P365-P372 ISSN: 21628777, 21628769 ESIでのカテゴリ: PHYSICS
出版社	The Electrochemical Society
発表年	2017
言語	English
DOI	https://doi.org/10.1149/2.0071707jss
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