Double-Polarity Selective Area Growth of GaN Metal Organic Vapor Phase Epitaxy by Using Carbon Mask Layers | SAMURAI, NIMS Researchers Directory Service

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Double-Polarity Selective Area Growth of GaN Metal Organic Vapor Phase Epitaxy by Using Carbon Mask Layers

Yohei Fujita, Yasushi Takano, Yoku Inoue, Masatomo Sumiya, Shunro Fuke, Takayuki Nakano.

Japanese Journal of Applied Physics 52 [8S] 08JB26. 2013.

https://doi.org/10.7567/jjap.52.08jb26

NIMS author(s)

Fulltext and dataset(s) on Materials Data Repository (MDR)

Created at: 2016-05-24 17:19:04 +0900Updated at: 2024-04-02 04:32:12 +0900

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