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Heavy phosphorus doping of diamond by hot-filament chemical vapor deposition

Yūki Katamune, Akira Izumi, Kimiyoshi Ichikawa, Satoshi Koizumi.
Diamond and Related Materials 134 109789. 2023.
https://doi.org/10.1016/j.diamond.2023.109789

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    Created at: 2023-03-29 03:43:58 +0900 Updated at: 2026-03-23 08:29:06 +0900

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