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AuthorT. Yamashita, H. Matsuhata, T. Sekiguchi, K. Momose, H. Osawa, M. Kitabatake.
TitleCharacterization of comet-shaped defects on C-face 4H-SiC epitaxial wafers by electron microscopy
Journal titleJournal of Crystal Growth 416 142 147
ISSN: 00220248
Year of publication2015
LanguageEnglish
DOI10.1016/j.jcrysgro.2015.01.034
ESI categoryCHEMISTRY
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