Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling | SAMURAI, NIMS Researchers Directory Service

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Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion milling

MITSUISHI, Kazutaka, SHIMOJO, Masayuki, TANAKA, Miyoko, TAKEGUCHI, Masaki, FURUYA, Kazuo.

JAPANESE JOURNAL OF APPLIED PHYSICS 5627-5630. 2005.

https://doi.org/10.1143/jjap.44.5627

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Created at: 2022-10-21 22:03:08 +0900 Updated at: 2026-11-04 06:31:36 +0900

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