HOME > 論文 > 書誌詳細Resolution in nanofabrication by electron-beam induced deposition combined with low energy ion millingMITSUISHI, Kazutaka, SHIMOJO, Masayuki, TANAKA, Miyoko, TAKEGUCHI, Masaki, FURUYA, Kazuo. JAPANESE JOURNAL OF APPLIED PHYSICS 5627-5630. 2005.https://doi.org/10.1143/jjap.44.5627 NIMS著者三石 和貴田中 美代子竹口 雅樹Materials Data Repository (MDR)上の本文・データセット作成時刻: 2022-10-21 22:03:08 +0900更新時刻: 2024-04-02 00:11:09 +0900