HOME > 論文 > 書誌詳細Uncertainty evaluation of Monte Carlo simulated line scan profiles of a critical dimension scanning electron microscope (CD-SEM)M. S. S. Khan, S. F. Mao, Y. B. Zou, Y. G. Li, B. Da, Z. J. Ding. Journal of Applied Physics 133 [24] 245303. 2023.https://doi.org/10.1063/5.0153379 NIMS著者達 博Materials Data Repository (MDR)上の本文・データセット作成時刻: 2023-12-22 09:25:25 +0900更新時刻: 2024-09-12 09:16:29 +0900
