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Uncertainty evaluation of Monte Carlo simulated line scan profiles of a critical dimension scanning electron microscope (CD-SEM)

M. S. S. Khan, S. F. Mao, Y. B. Zou, Y. G. Li, B. Da, Z. J. Ding.

Journal of Applied Physics 133 [24] 245303. 2023.

https://doi.org/10.1063/5.0153379

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Created at: 2023-12-22 09:25:25 +0900 Updated at: 2026-09-07 08:46:30 +0900

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