HOME > Article > DetailSelf-Temperature-Compensated GaN MEMS Resonators through Strain Engineering up to 600 KL. Sang, H. Sun, X. Yang, T. Li, B. Shen, M. Liao. Technical Digest - International Electron Devices Meeting 26.4.1-26.4.4. 2020.https://doi.org/10.1109/iedm13553.2020.9372065 NIMS author(s)SANG, LiwenLIAO, MeiyongFulltext and dataset(s) on Materials Data Repository (MDR)Created at: 2022-11-15 00:41:31 +0900Updated at: 2024-04-02 05:04:10 +0900
