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AuthorW. Hamouda, C. Lubin, S. Ueda, Y. Yamashita, O. Renault, F. Mehmood, T. Mikolajick, U. Schroeder, R. Negrea, N. Barrett.
TitleInterface chemistry of pristine TiN/La: Hf 0.5 Zr 0.5 O 2 capacitors
Journal titleApplied Physics Letters 116 [25] 252903
ISSN: 10773118 00036951
Year of publication2020
ESI category
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