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Oxygen-radical-assisted pulsed-laser deposition of β-Ga2O3 and β-(Al Ga1−)2O3 films

Ryo Wakabayashi, Takayoshi Oshima, Mai Hattori, Kohei Sasaki, Takekazu Masui, Akito Kuramata, Shigenobu Yamakoshi, Kohei Yoshimatsu, Akira Ohtomo.
Journal of Crystal Growth 424 77-79. 2015.

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