Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-situ Heating TEM Observation

Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-situ Heating TEM Observation
(その場加熱TEM観察によるAl誘起結晶化法に伴う多結晶Si薄膜生成過程の直接観察)

Seiichiro Ii, Takeshi Hirota, Kensuke Fujimoto, Youhei Sugimoto, Naoki Takata, Ken-ichi Ikeda, Hideharu Nakashima, Hiroshi Nakashima.

Created at: 2016-05-24 15:41:16 +0900 Updated at: 2026-10-29 05:21:03 +0900