Direct Evidence of Polycrystalline Silicon Thin Films Formation during Aluminum Induced Crystallization by In-situ Heating TEM Observation
(その場加熱TEM観察によるAl誘起結晶化法に伴う多結晶Si薄膜生成過程の直接観察)
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Fulltext and dataset(s) on Materials Data Repository (MDR)
Created at: 2016-05-24 15:41:16 +0900Updated at: 2024-04-30 05:30:58 +0900