Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC cm−2 around 10 nm in thickness

著者	Ryoichi Mizutani, Shinnosuke Yasuoka, Takahisa Shiraishi, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Osami Sakata, Hiroshi Funakubo.
掲載誌名	Applied Physics Express 14 [10] 105501 ISSN: 18820786, 09538984, 18820778 ESIでのカテゴリ: PHYSICS
出版社	IOP Publishing
発表年	2021
言語	English
DOI	https://doi.org/10.35848/1882-0786/ac2261
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