Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC cm−2 around 10 nm in thickness

Ryoichi Mizutani; Shinnosuke Yasuoka; Takahisa Shiraishi; Takao Shimizu; Masato Uehara; Hiroshi Yamada; Morito Akiyama; Osami Sakata; Hiroshi Funakubo

doi:10.35848/1882-0786/ac2261

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Thickness scaling of (Al0.8Sc0.2)N films with remanent polarization beyond 100 μC cm−2 around 10 nm in thickness

Ryoichi Mizutani, Shinnosuke Yasuoka, Takahisa Shiraishi, Takao Shimizu, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Osami Sakata, Hiroshi Funakubo.

Applied Physics Express 14 [10] 105501. 2021.

https://doi.org/10.35848/1882-0786/ac2261

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作成時刻: 2021-11-27 03:36:26 +0900更新時刻: 2024-04-02 04:49:53 +0900