Impact of Deposition Temperature on Crystal Structure and Ferroelectric Properties of (Al
1−
x
Sc
x
)N Films Prepared by Sputtering Method
| 著者 | Shinnosuke Yasuoka, Takao Shimizu, Akinori Tateyama, Masato Uehara, Hiroshi Yamada, Morito Akiyama, Hiroshi Funakubo. |
|---|---|
| 掲載誌名 | physica status solidi (a) 218 [17] 2100302 ISSN: 18626319, 18626300, 00318965 ESIでのカテゴリ: PHYSICS |
| 出版社 | Wiley |
| 発表年 | 2021 |
| 言語 | English |
| DOI | https://doi.org/10.1002/pssa.202100302 |
| この文献をMendeleyにインポート |  |