In situ Metal Mask for Selective Area Growth of Thin Epitaxial Layers

In situ Metal Mask for Selective Area Growth of Thin Epitaxial Layers
(極薄膜エピタキシャル選択成長のための”その場”メタルマスク)

Shunsuke Ohkouchi, Nobuhiko Ozaki, Yoshiaki Takata, Yoshinori Kitagawa, Yusui Nakamura, IKEDA, Naoki, SUGIMOTO, Yoshimasa, Kiyoshi Asakawa.

Created at: 2022-10-21 22:42:11 +0900 Updated at: 2022-10-21 22:42:11 +0900